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基于激光扫描法的非接触式光学元件曲率半径测量系统
Alternative TitleNon-Contact Optical Component Curvature Radius Detection System Based on Laser Scanning
覃瑛; 许骏
Source Publication激光与光电子学进展(Laser & Optoelectronics Progress)
2016
Volume53Issue:9Pages:149-156
DOI10.3788/LOP53.091203
ClassificationTP29
Contribution Rank第1完成单位
Indexed ByCSCD ; 核心
Keyword测量 面形检测 激光扫描法 光学元件 自动化 曲面拟合
Abstract

介绍了基于激光扫描法的非接触式光学元件曲率半径检测系统,该系统大大提高了光学元件粗磨后曲率半径检测的自动化程度,实现了软硬件结合的一键式面形数据获取。该系统利用x/y轴二维平移台的运动实现网格扫描,同时基于激光扫描法测量面形弧高,并附加有z轴升降台扩展弧高量程。设计了上位机控制程序和人机交互界面,使系统在后期使用中更为灵活便捷。编写了曲面拟合算法,最终实现光学元件面形数据的自动采集、拟合以及相关光学参数的计算,可完成对多种光学元件面形的非接触式检测。实验结果表明,无论待测光学元件的表面落差是否超出激光头测量范围,系统均能完整采集所需面形数据,经过误差处理后,测量精度优于±0.15%,满足粗磨检测要求。

Other Abstract

In this paper, a non-contact optical component curvature radius detection system based on laser scanning method is introduced. With this method, the automation degree of the curvature radius detection after rough grinding of the optical elements is greatly improved, and the software-hardware combined one-click surface shape data are obtained as well. This system uses x/y-axis two-dimensional translation stage motion for grid scanning. Meanwhile, it measures surface shape camber based on laser scanning method and adds z axis lifting platform to increase the camber measurement range. Computer control program and the human-computer interaction interface are designed to make the system more flexible and convenient at later stage. The surface fitting algorithm is written, and the automatic acquisition and fitting of the optical surface shape data as well as the calculation of the relevant optical parameters are realized ultimately, then the detection of a variety of non-contact optical component surface shapes can be completed. Experiment results show that the system can get the required surface shape data whether the surface gap of optical components under test is beyond the measuring range of the laser head or not. After error processing, the measurement accuracy meets the testing requirements of rough grinding and is better than ±0.15 %.

Funding ProjectN/A
Funding OrganizationN/A
Language中文
Subject Area电子、通信与自动控制技术 ; 光电子学与激光技术 ; 自动控制技术
MOST Discipline Catalogue工学 ; 工学::电子科学与技术(可授工学、理学学位) ; 工学::控制科学与工程
ISSN1006-4125
Archive Date2017-05-24
CSCD IDCSCD:5800491
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ynao.ac.cn/handle/114a53/9832
Collection抚仙湖太阳观测站
Affiliation中国科学院云南天文台云南省应用天文技术工程实验室,云南,昆明,650011
First Author AffilicationYunnan Observatories, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
覃瑛,许骏. 基于激光扫描法的非接触式光学元件曲率半径测量系统[J]. 激光与光电子学进展(Laser & Optoelectronics Progress),2016,53(9):149-156.
APA 覃瑛,&许骏.(2016).基于激光扫描法的非接触式光学元件曲率半径测量系统.激光与光电子学进展(Laser & Optoelectronics Progress),53(9),149-156.
MLA 覃瑛,et al."基于激光扫描法的非接触式光学元件曲率半径测量系统".激光与光电子学进展(Laser & Optoelectronics Progress) 53.9(2016):149-156.
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