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Alternative TitleNon-Contact Optical Component Curvature Radius Detection System Based on Laser Scanning
覃瑛; 许骏
Source Publication激光与光电子学进展(Laser & Optoelectronics Progress)
Contribution Rank第1完成单位
Indexed ByCSCD ; 核心
Keyword测量 面形检测 激光扫描法 光学元件 自动化 曲面拟合


Other Abstract

In this paper, a non-contact optical component curvature radius detection system based on laser scanning method is introduced. With this method, the automation degree of the curvature radius detection after rough grinding of the optical elements is greatly improved, and the software-hardware combined one-click surface shape data are obtained as well. This system uses x/y-axis two-dimensional translation stage motion for grid scanning. Meanwhile, it measures surface shape camber based on laser scanning method and adds z axis lifting platform to increase the camber measurement range. Computer control program and the human-computer interaction interface are designed to make the system more flexible and convenient at later stage. The surface fitting algorithm is written, and the automatic acquisition and fitting of the optical surface shape data as well as the calculation of the relevant optical parameters are realized ultimately, then the detection of a variety of non-contact optical component surface shapes can be completed. Experiment results show that the system can get the required surface shape data whether the surface gap of optical components under test is beyond the measuring range of the laser head or not. After error processing, the measurement accuracy meets the testing requirements of rough grinding and is better than ±0.15 %.

Funding ProjectN/A
Funding OrganizationN/A
Subject Area电子、通信与自动控制技术 ; 光电子学与激光技术 ; 自动控制技术
MOST Discipline Catalogue工学 ; 工学::电子科学与技术(可授工学、理学学位) ; 工学::控制科学与工程
Archive Date2017-05-24
Citation statistics
Document Type期刊论文
First Author AffilicationYunnan Observatories, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
覃瑛,许骏. 基于激光扫描法的非接触式光学元件曲率半径测量系统[J]. 激光与光电子学进展(Laser & Optoelectronics Progress),2016,53(9):149-156.
APA 覃瑛,&许骏.(2016).基于激光扫描法的非接触式光学元件曲率半径测量系统.激光与光电子学进展(Laser & Optoelectronics Progress),53(9),149-156.
MLA 覃瑛,et al."基于激光扫描法的非接触式光学元件曲率半径测量系统".激光与光电子学进展(Laser & Optoelectronics Progress) 53.9(2016):149-156.
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