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激光扫描法测量天文光学零件面形的研究
其他题名The study of based on the laser scanning method to measure the surface shape of astronomical optical componen
覃瑛
学位类型硕士
导师许骏
2016-07-01
学位授予单位中国科学院大学
学位授予地点北京
培养单位中国科学院云南天文台
学位专业天文技术与方法
关键词非接触式 自动化 粗磨检测 曲面拟合 低成本
摘要云南天文台于2013年申请建立云南省应用天文技术工程实验室,现已获批。在当前亟待解决的关键技术问题中,对天文光学零件镜面的面形检测是一个重点。常用的检测方法分为接触式检测和非接触式检测两大类。目前工厂中通常使用接触式球径仪对光学镜面进行粗磨检测,这种测量方法虽然原理简单,但是由于测量点有限,网格较粗,效率低下,而且因为是接触式测量,所以不适合检测晶体等表面较软的镜片,同时对于表面光洁度要求较高的镜面也存在检测困难。而非接触式球径仪市场价格又十分昂贵,在光学零件研磨初期并没有很高的性价比。因此,研制出一套相对低成本、扩展性强、灵活度高的非接触式自动化面形检测系统实现球径仪的功能,完成对光学镜面的粗磨检测是十分必要的。本系统硬件上采用KEYENCE LT-9031高精度激光测量仪、DANAHER ULTI-MAC-G型控制器及配套二维移动平台和卓立汉光KSAV2030-ZF高精密电控垂直升降台搭建,并基于STM32系列控制芯片设计制作了控制器完成指令分配和调度功能,利用串口通信控制x轴/y轴二维平移台的运动实现网格扫描,基于激光扫描法测量面形弧高,但由于采用的共焦显微镜原理测量范围较窄,添置了z轴升降台扩大测量范围,设计上位机控制程序和人机交互界面,使系统在后期使用更为灵活便捷,编写了曲面拟合算法,最终实现光学零件面形数据的自动采集、拟合,以及相关光学参数的计算。通过实验证明,无论待测光学零件的表面落差是否超出激光头测量范围,本文研究的非接触式面形检测系统均可完整采集所需面形数据,并在曲面拟合后给出相关光学参数。该系统实现了软硬件结合,能对多种光学零件面形进行一键式自动检测,并能达到粗磨检测的精度要求,并且成本较低,能满足我实验室工作的需要,也符合市场需求。
其他摘要In 2013, Yunnan Observatories applied for establishing Yunnan Astronomical Applications Engineering Laboratory, it has been approved. In the current key technical issues to be solved, the optical components of the astronomical mirror surface shape detection is a priority. Commonly used detection method is divided into contact and non-contact. Currently the plant commonly used contact spherometer to detect coarse grinding optical mirror, this measurement method, although simple in principle, but due to the limited measurement points, coarse mesh, inefficient, but also because it is contact measurement, it is not suitable surface inspection for crystals soft lenses,and it will also scratches on the surface finish higher mirror in the testing process. Non-contact spherometer is very expensive, and in the early part of the optical grinding is not cost-effective. Therefore, the development of a set of relatively low-cost, scalable, high flexibility of the non-contact surface shape detection system to achieve automatic spherometer’s function, complete the optical mirror kibble detection is necessary.The hardware used KEYENCE LT-9031 high-precision laser measuring instrument, DANAHER ULTI-MAC-G controller and supporting two-dimensional mobile platforms and Zolix KSAV2030-ZF electronically controlled high-precision vertical lift to construct, and based on STM32 series controller chip designed controller to complete the instruction allocation and scheduling functions, the use of serial communication control x-axis / y-axis motion-dimensional translation stage to achieve grid scanning, the measurement based on laser scanning arc-shaped surface of high, but due to the principle of confocal microscopy measurement range is narrow, the acquisition of the z-axis to expand the measurement range of lifts, designed PC control program and the man-machine interface, making the system more flexible and convenient to use at later stage, coded the surface fitting algorithm, and ultimately realized the automatic acquisition of the optical surface shape data of the part, fitting, as well as the relevant optical parameters calculations.The experimental results show whether the test optical element surface gap exceeds the measurement range of the laser head, this thesis studied non-contact surface shape detection system can complete the required surface shape data collection, and give the relevant optical parameters after surface fitting. The system implements hardware and software, capable of a variety of optical element surface shaped one-touch automatic detection and precision can be achieved kibble detection, and low cost, not only meet the needs of my lab work, but also in line with market demand.
学科领域天文学 ; 天文学其他学科 ; 机械工程 ; 仪器仪表技术 ; 光学技术与仪器 ; 天文仪器
学科门类理学 ; 理学::天文学
页数70
语种中文
文献类型学位论文
条目标识符http://ir.ynao.ac.cn/handle/114a53/25359
专题抚仙湖太阳观测和研究基地
作者单位中国科学院云南天文台
第一作者单位中国科学院云南天文台
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GB/T 7714
覃瑛. 激光扫描法测量天文光学零件面形的研究[D]. 北京. 中国科学院大学,2016.
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